Micro Physics. Dynamic Measurement of Micro-mechanical-systems.

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

Micro - Electro - Mechanical - Systems ( Mems )

Nanotube micro-opto-mechanical systems

While there have been numerous reports on the electromechanical actuation of carbon nanotubes (CNTs), devices based on the photomechanical actuation of CNTs have been elusive until now. In this paper, we report the integration of single-wall carbon nanotube ensembles into micro-mechanical systems to realize a new carbon nanotube micro-opto-mechanical system (CNT-MOMS). CNT-MOM grippers were fab...

fractional order control of micro electro-mechanical systems

this paper addresses the problem of the fractional sliding mode control (fsmc) for a mems optical switch. the proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. after a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...